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Proceedings of IMECE2006 2006 ASME International Mechanical Engineering Congress and Exposition
 

Summary: Proceedings of IMECE2006
2006 ASME International Mechanical Engineering Congress and Exposition
November 5-10, 2006, Chicago, Illinois USA
IMECE2006-13175
MODELING AND INPUT OPTIMIZATION UNDER UNCERTAINTY FOR A
COLLECTION OF RF MEMS DEVICES
M. S. Allen
J. E. Massad
R. V. Field, Jr.
Applied Mechanics Development, Org. 1526
Sandia National Laboratories1
Albuquerque, New Mexico 87185
ABSTRACT
The dynamic response of an RF MEMS device to a time-
varying electrostatic force is optimized to enhance robustness to
variations in material properties and geometry. The device func-
tions as an electrical switch, where an applied voltage is used to
close a circuit. The objective is to minimize the severity of the
mechanical impact that occurs each time the switch closes, be-
cause severe impacts have been found to significantly decrease

  

Source: Allen, Matthew S. - Department of Engineering Physics, University of Wisconsin at Madison

 

Collections: Engineering