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PHASE NOISE SHAPING VIA FORCED NONLINEARITY IN PIEZOELECTRICALLY ACTUATED SILICON MICROMECHANICAL
 

Summary: PHASE NOISE SHAPING VIA FORCED NONLINEARITY IN
PIEZOELECTRICALLY ACTUATED SILICON MICROMECHANICAL
OSCILLATORS
M. Pardo1,3
, L. Sorenson1
, W. Pan2
, and F. Ayazi1
1
Georgia Institute of Technology, Atlanta, Georgia, USA
2
Integrated Device Technology, San Jose, California, USA
3
Fundación Universidad del Norte, Barranquilla, COLOMBIA
ABSTRACT
This paper shows improved phase-noise performance of
MEMS oscillators when the sustaining amplifier operates a
lateral bulk acoustic wave AlN-on-Si resonator in the
nonlinear regime. An empirical exponential-series-based
model that closely describes the phase noise in nonlinearity
is presented, reflecting the increased resonator filter order

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering