Home

About

Advanced Search

Browse by Discipline

Scientific Societies

E-print Alerts

Add E-prints

E-print Network
FAQHELPSITE MAPCONTACT US


  Advanced Search  

 
Multiscale electrostatic analysis of silicon nanoelectromechanical systems (NEMS) via heterogeneous quantum models
 

Summary: Multiscale electrostatic analysis of silicon nanoelectromechanical systems (NEMS)
via heterogeneous quantum models
Yang Xu and N. R. Aluru*
Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, USA
Received 4 September 2007; published 11 February 2008
A multiscale method, seamlessly combining semiclassical, effective-mass Schrödinger EMS , and tight-
binding TB theories, is proposed for electrostatic analysis of silicon nanoelectromechanical systems NEMS .
By using appropriate criteria, we identify the physical models that are accurate in each local region. If the local
physical model is semiclassical, the charge density is directly computed by the semiclassical theory. If the local
physical model is quantum mechanical the EMS or TB model , the charge density is calculated by using the
theory of local density of states LDOS . The LDOS is efficiently calculated from the Green's function by
using Haydock's recursion method where the Green's function is expressed as a continued fraction based on
the local Hamiltonian. Once the charge density is determined, a Poisson equation is solved self-consistently to
determine the electronic properties. The accuracy and efficiency of the multiscale method are demonstrated by
considering two NEMS examples, namely, a silicon fixed-fixed beam with hydrogen termination surfaces and
another silicon beam switch with 90° single period partial dislocations. The accuracy and efficiency of the
multiscale method are demonstrated.
DOI: 10.1103/PhysRevB.77.075313 PACS number s : 85.85. j, 47.11.St, 41.20.Cv
I. INTRODUCTION
As significant progress is being made in various fields of

  

Source: Aluru, Narayana R. - Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign

 

Collections: Engineering; Materials Science