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Summary: Monolithic Silicon Probes with Flexible Parylene Cables
for Neural Prostheses
Changlin Pang1
*, Jorge G. Cham2
, Sam Musallam3
, Yu-Chong Tai1
, Joel W. Burdick2
, and Richard A. Andersen3
1
Caltech Micromachining Lab, California Institute of Technology, Pasadena, CA 91125, USA
2
Department of Mechanical Engineering, California Institute of Technology, Pasadena, CA 91125, USA
3
Division of Biology, California Institute of Technology, Pasadena, CA 91125, USA
Abstract--This work presents the first parylene-insulated silicon
probes, which are used for neural prostheses to record high-level
cognitive neural signals. With parylene technology, our probes
have several advantages compared with the current devices. First,
instead of inorganic materials (e.g. silicon dioxide, silicon nitride),
the electrodes and conduction traces on the probes are insulated
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