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JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 14, NO. 4, AUGUST 2005 707 A Single-Crystal Silicon Symmetrical and Decoupled
 

Summary: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 14, NO. 4, AUGUST 2005 707
A Single-Crystal Silicon Symmetrical and Decoupled
MEMS Gyroscope on an Insulating Substrate
Said Emre Alper and Tayfun Akin, Member, IEEE
Abstract--This paper presents a single-crystal silicon symmet-
rical and decoupled (SYMDEC) gyroscope implemented using the
dissolved wafer microelectromechanical systems (MEMS) process
on an insulating substrate. The symmetric structure allows
matched resonant frequencies for the drive and sense vibration
modes for high-rate sensitivity and low temperature-dependent
drift, while the decoupled drive and sense modes prevents unstable
operation due to mechanical coupling, achieving low bias-drift.
The 1215- m-thick single-crystal silicon structural layer with
an aspect ratio of about 10 using DRIE patterning provides a
high sense capacitance of 130 fF, while the insulating substrate
provides a low parasitic capacitance of only 20 fF. A capacitive
interface circuit fabricated in a 0.8- mCMOS process and having
a sensitivity of 33 mV/fF is hybrid connected to the gyroscope.
Drive and sense mode resonance frequencies of the gyroscope
are measured to be 40.65 and 41.25 kHz, respectively, and their

  

Source: Akin, Tayfun - Department of Electrical and Electronics Engineering, Middle East Technical University

 

Collections: Engineering