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Single-electron transistor as a charge sensor for semiconductor applications
 

Summary: Single-electron transistor as a charge sensor
for semiconductor applications
David Berman
Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology,
Cambridge, Massachusetts 02139
Nikolai B. Zhitenev and Raymond C. Ashoori
Department of Physics, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139
Henry I. Smitha)
Department of Electrical Engieering and Computer Science, Massachusetts Institute of Technology,
Cambridge, Massachusetts 02139
Michael R. Melloch
Department of Electrical Engineering and Computer Science, Purdue University, West Lafayette, Indiana
47907
Received 6 June 1997; accepted 5 August 1997
We describe the use of aluminum single-electron transistors SETs to measure, with extremely high
sensitivity, the fluctuation of charge in semiconductor quantum dots. Our method of fabricating
SETs results in excellent reliability and reproducibility. 1997 American Vacuum Society.
S0734-211X 97 08706-4
I. INTRODUCTION
Recently, single-electron transistors SETs have gained

  

Source: Ashoori, Raymond - Department of Physics, Massachusetts Institute of Technology (MIT)

 

Collections: Physics