| | |
Summary: ELECTROSTATICALLY COUPLED MICROMECHANICAL BEAM FILTERS
Siavash Pourkamali, Reza Abdolvand, Gavin K. Ho and Farrokh Ayazi
School of Electrical and Computer Engineering
Georgia Institute of Technology, Atlanta, GA 30332-0250, USA
Email: siavash@ece.gatech.edu; Tel: 1-404-385-4306; Fax: 1-404-894-5028
ABSTRACT
This paper presents a new electrical coupling technique for
implementation of high-order narrow-bandwidth
programmable bandpass filters using micromechanical
resonators. The concept of electrostatic coupling of closely-
spaced microresonators for filter synthesis is introduced and
its electromechanical modeling is presented. The
electrostatic coupling approach eliminates the need for any
physical coupling element in between the resonators and
provides the highest degree of tunability and design
flexibility among the available filter synthesis approaches.
Low frequency single crystal silicon prototypes of second
order electrostatically coupled filters have been successfully
implemented and characterized. Filter quality factors as high
as 6,800 (0.015%BW) with more than one decade of
|
