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6.4 GHZ ACOUSTIC SENSOR FOR IN-SITU MONITORING OF AFM TIP WEAR
 

Summary: 6.4 GHZ ACOUSTIC SENSOR FOR IN-SITU MONITORING OF
AFM TIP WEAR
Tiffany J. Cheng1
, Jun Hyun Han2
, Michael Ziwisky2
, Chung Hoon Lee2
and Sunil A. Bhave1
1
Cornell University, Ithaca, NY, USA
2
Marquette University, Milwaukee, WI, USA
ABSTRACT
This paper demonstrates an acoustic sensor that can
resolve atomic force microscopy (AFM) tip blunting with a
frequency sensitivity of 0.007%. The AFM tip is fabricated
on a thin film piezoelectric aluminum nitride (AlN)
membrane that is excited as a film bulk acoustic resonator
(FBAR). We demonstrate that cutting 0.98 Ám off of the tip
apex results in a resonance frequency change of 0.4MHz at
6.387GHz. This work demonstrates the potential for in-situ

  

Source: Afshari, Ehsan - School of Electrical and Computer Engineering, Cornell University

 

Collections: Engineering