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Deposition Manual Appelbaum Lab

Summary: Deposition Manual
Appelbaum Lab
Make sure you wear the proper attire before handling objects that are inside or are
to be placed inside of the vacuum. This includes gloves, clean room suit, and mask.
Furthermore, all objects should be cleaned properly before entering the vacuum.
The idea is to have as few particles in the vacuum as possible.
To mount the sample, use tweezers
to place a small piece of black tape on
sample holder. Press sample onto
tape, fully covering it. The mask can
be slid under the 3 prongs and over
the sample. Take care not to scratch
the surface of your sample with the
mask or tweezers. After the mask is in
place, place the sample holder on the
transfer arm inside the load lock. The
preferred orientation of the sample
holder is as follows: when facing the
load lock, orient the middle prong of


Source: Appelbaum, Ian - Department of Physics, University of Maryland at College Park


Collections: Engineering; Materials Science