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Fabrication of microcantilever-based IO grated waveguide sensors for detection of nano-displacements
 

Summary: Fabrication of microcantilever-based IO grated
waveguide sensors for detection of nano-displacements
Pham Van So, L.J. Kauppinen, H.J.W.M. Hoekstra, M. Dijkstra, H.A.G.M. van
Wolferen, G.J.M. Krijnen and R.M. de Ridder
MESA+
Institute for Nanotechnology, University of Twente,
7500 AE Enschede, The Netherlands
s.v.pham@ewi.utwente.nl
We propose a novel and highly sensitive integrated read-out scheme, capable of
detecting sub-nanometre deflections of a cantilever in close proximity to a grated
waveguide structure. A very compact and stable sensor element can be realized by
monolithically integrating a microcantilever structure with the grated waveguide
(GWG), using conventional layer deposition and sacrificial layer etching techniques.
The platform integrating a high quality GWG and a low initial bending cantilever has
been fabricated and characterized.
Introduction
Microcantilever-based sensors can be used to detect molecular adsorption, which causes
changes in the surface stress [1], leading to deflection of the cantilever. Often, an optical
beam deflection method is used to measure the cantilever deflection [2]. Although the
method is simple and accurate, it is bulky, and therefore dense and compact integration

  

Source: Al Hanbali, Ahmad - Department of Applied Mathematics, Universiteit Twente

 

Collections: Engineering