Summary: Synthesis and Characterization of Diorganohydrazido(2­) Tungsten
Complexes
Jürgen Koller, Hiral M. Ajmera, Khalil A. Abboud, Timothy J. Anderson,* and Lisa McElwee-White*
Department of Chemistry, UniVersity of Florida, GainesVille, Florida 32611-7200, and Department
of Chemical Engineering, UniVersity of Florida, GainesVille, Florida 32611-6005
Received June 12, 2007
Diorganohydrazido(2­) complexes of tungsten (L)Cl4W(NNR2) [R2 ) Me2, Ph2, ­(CH2)5­; L ) CH3CN, pyridine]
were synthesized by reacting the corresponding 1,1-diorganohydrazine with WCl6, followed by reaction with acetonitrile
or pyridine. Crystallographic structure determination of (CH3CN)Cl4W(NNMe2) and (CH3CN)Cl4W(NNPh2) allows a
comparison of the structural features of the diorganohydrazido(2­) functionality with varying substituents. Mass
spectrometry, thermogravimetric analysis, and preliminary chemical vapor deposition experiments were performed
to determine the viability of these complexes as single-source precursors for deposition of WNx and WNxCy films.
Introduction
Early transition-metal complexes of diorganohydrazido(2­)
ligands have appeared in the literature since the 1970s.1­14
The potential application of these compounds as single-
source precursors for the deposition of transition-metal
nitrides has generated renewed interest in synthesizing them
for use in materials chemistry.15­17
One motivation for

Source: Anderson, Timothy J. - Chemical Engineering Department, University of Florida

Collections: Materials Science