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Performance comparison of Pb,,Zr0.52Ti0.48...O3-only and Pb,,Zr0.52Ti0.48...O3-on-silicon resonators

Summary: Performance comparison of Pb,,Zr0.52Ti0.48...O3-only and
Pb,,Zr0.52Ti0.48...O3-on-silicon resonators
Hengky Chandrahalim,1,a
Sunil A. Bhave,1
Ronald Polcawich,2
Jeff Pulskamp,2
Daniel Judy,2
Roger Kaul,2
and Madan Dubey2
OxideMEMS Laboratory, Cornell University, Ithaca, New York 14853, USA
U.S. Army Research Laboratory, Adelphi, Maryland 20783, USA
Received 3 July 2008; accepted 21 November 2008; published online 10 December 2008
This paper provides a quantitative comparison and explores the design space of lead zirconium
titanate PZT ­only and PZT-on-silicon length-extensional mode resonators for incorporation into
radio frequency microelectromechanical system filters and oscillators. We experimentally measured
the correlation of motional impedance RX and quality factor Q with the resonators' silicon layer
thickness tSi . For identical lateral dimensions and PZT-layer thicknesses tPZT , the PZT-on-silicon
resonator has higher resonant frequency fC , higher Q 5100 versus 140 , lower RX 51 versus


Source: Afshari, Ehsan - School of Electrical and Computer Engineering, Cornell University


Collections: Engineering