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Stoichiometry Issues in Pulsed Laser Deposition of Alloys Grown from Multicomponent Targets Craig B. Arnold*
 

Summary: Stoichiometry Issues in Pulsed Laser Deposition of Alloys Grown from Multicomponent Targets
Craig B. Arnold*
and Michael J. Aziz
Division of Engineering and Applied Sciences,
Harvard University, Cambridge, USA
Abstract:
We are examining the degree of congruent transfer in Pulsed Laser Deposition (PLD) of alloy thin films in phases that are stable
over a wide range of compositions. SiGe films were deposited by PLD on high purity glassy carbon substrates. We analyzed the
average composition of these films using Rutherford backscattering spectrometry (RBS) and results show that the deposited films
have a higher relative concentration of Ge than the initial targets. We infer that the non-congruent transfer is due to differential
scattering in the plume itself. Additionally, the local composition of the particulates was measured using microprobe analysis
and these observations are compared between a sintered target of Si and Ge powders and a solidified target of melted Si and Ge.
The sintered target produces particulates with a wide range of compositions, whereas the solidified target produces five times
fewer particulates with a tighter distribution of compositions. In contrast to the average composition of the films, the average
composition of the particulates is the same as that of the targets. These results are discussed in terms of the microstructure of the
targets and the melting process at the surface. The implications of these observations for composition determination by laser
ablation are discussed.
*
Also: Department of Physics, Harvard University
One of the major advantages of Pulsed Laser

  

Source: Aziz, Michael J.- School of Engineering and Applied Sciences, Harvard University

 

Collections: Physics; Materials Science