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616 IEEE SENSORS JOURNAL, VOL. 9, NO. 6, JUNE 2009 The Resonating Star Gyroscope: A Novel
 

Summary: 616 IEEE SENSORS JOURNAL, VOL. 9, NO. 6, JUNE 2009
The Resonating Star Gyroscope: A Novel
Multiple-Shell Silicon Gyroscope With
Sub-5 deg/hr Allan Deviation Bias Instability
Mohammad Faisal Zaman, Member, IEEE, Ajit Sharma, Member, IEEE, and Farrokh Ayazi, Senior Member, IEEE
Abstract--We report on the design, fabrication and characteri-
zation of a novel multiple-shell silicon vibratory microgyroscope.
The resonating star gyroscope (RSG) is formed as a merged su-
perposition of two square shells, yielding in-plane flexural modes
that are utilized to sense rotation along the normal axis. The
first prototypes of the single-shell RSG were implemented with
65 m thick trench-refilled polysilicon structural material using
the HARPSS process. These devices exhibited open-loop rate
sensitivity of approximately 800 V/deg/s. Despite high-aspect
ratio sensing gaps, the device yielded poor sensitivity caused by
low resonant-mode quality factors. To alleviate the TED losses
caused by the inevitable formation of voids in trench-refilled
structural material, the RSG was implemented in (111) single
crystalline silicon. A 2.5-mm multiple-shell RSG was fabricated in
40 m-thick SOI device layer using a simple two-mask process.

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering