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Engineering Analysis with Boundary Elements 30 (2006) 909 Applications in micro-and nanoelectromechanical systems

Summary: Engineering Analysis with Boundary Elements 30 (2006) 909
Applications in micro- and nanoelectromechanical systems
Microelectromechanical systems (MEMS) are miniatur-
ized sensors, actuators, devices and systems with a critical
dimension of the order of micrometers. Advances in
micromachining technology have led to significant progress
in the area of MEMS. Micromachined devices such as
accelerometers, gyroscopes, high performance mirror dis-
plays, pressure sensors, micromotors, microengines, RF
switches, valves, pumps, thermally and chemically sensitive
membranes, single-chip microfluidic systems such as
chemical analyzers or synthesizers, single-chip micro-
total-analysis systems (also referred to as lab-on-a-chip)
and many more devices and systems have been designed
and fabricated over the last one to two decades. The
application domain for microelectromechanical (MEM)
devices is enormous as they need low maintenance.
MEMS-based systems can be used for personal monitoring
and dosing, as light weight vehicle sensors, for manufac-


Source: Aluru, Narayana R. - Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign


Collections: Engineering; Materials Science