Summary: MULTI-AXIS ALN-ON-SILICON VIBRATION ENERGY HARVESTER
WITH INTEGRATED FREQUENCY-UPCONVERTING TRANSDUCERS
J. L. Fu1
, Y. Nakano2
, L. D. Sorenson1
, and F. Ayazi1
1
Georgia Institute of Technology, Atlanta, Georgia, USA
2
Tohoku University, Sendai, Japan


ABSTRACT
This paper presents fully-integrated multi-axis
piezoelectric-on-silicon kinetic energy harvesters (KEHs)
that demonstrate enhanced power output via mechanical
frequency upconversion. Mechanical energy is converted
to electrical energy by out-of-plane and in-plane devices
that are micromachined on the same substrate. The out-of-
plane device demonstrates nearly 100 frequency

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

Collections: Engineering