 
Summary: Numerical Simulation of Grain Boundary Grooving By
Level Set Method
M. Khenner 1 A. Averbuch 1 M. Israeli 2 M. Nathan 3
1 Department of Computer Science
School of Mathematical Sciences
Tel Aviv University, Tel Aviv 69978, Israel
2 Faculty of Computer Science
Technion, Haifa 32000, Israel
3 Department of Electrical EngineeringPhysical Electronics
Faculty of Engineering
Tel Aviv University, Tel Aviv 69978, Israel
Abstract
A numerical investigation of grainboundary grooving by means of a Level Set
method is carried out. An idealized polycrystalline interconnect which consists of grains
separated by parallel grain boundaries aligned normal to the average orientation of the
surface is considered. Initially the surface diffusion is the only physical mechanism
assumed. The surface diffusion is driven by surface curvature gradients, while a fixed
surface slope and zero atomic flux are assumed at the groove root. The corresponding
mathematical system is an initial boundary value problem for a twodimensional equa
tion of HamiltonJacobi type. The results obtained are in good agreement with both
