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Summary: WA4-1 10:00
Proceedings of the 1999 ISEE
Jntcmational Conference on Control Applications
Kohala Coast-island of Hawai'i, Hawai'i, USA q August 22-27, 1999
System Identification of Anti-Vibration Units
in Semiconductor Exposure Apparatus
H. Kate*, S. Wakui*, T. Mayama", A. Toukairin+, H. Takanashi+, and S. Adachi+
+Dept. Electrical, Electronic Eng.*CANON INC.
Design Dept .15 Utsunomiya University
Semiconductor Production Equipment Development Center
20-2 Kiyohara-Kogy~danchi, Utsuno-miya
Tochigi, 321-3292, Japan
Phone : +81 286675711
Fax : +81 286705301
Abstract
In this paper, system identification of semiconductor ex-
posure apparatus is discussed. It has a multi-degrees-of-
freedom mechanism which includes anti-vibration units
for microvibration control. A dynamical model of the
mechanism is necessary in order to design the microvi-
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