Home

About

Advanced Search

Browse by Discipline

Scientific Societies

E-print Alerts

Add E-prints

E-print Network
FAQHELPSITE MAPCONTACT US


  Advanced Search  

 
A MODE-MATCHED 0.9 MHZ SINGLE PROOF-MASS DUAL-AXIS GYROSCOPE W.K. Sung, M. Dalal and F. Ayazi
 

Summary: x
-
Sense
A MODE-MATCHED 0.9 MHZ SINGLE PROOF-MASS DUAL-AXIS GYROSCOPE
W.K. Sung, M. Dalal and F. Ayazi
School of Electrical and Computer Engineering,
Georgia Institute of Technology, Atlanta, GA 30308-0250, USA
ABSTRACT
This paper reports on the design, fabrication, and
characterization of a high-frequency single proof-mass
dual-axis gyroscope. The hollow-disk pitch-and-roll
resonant gyroscope has electrostatically tunable in-plane
and out-of-plane resonance modes to enable mode-
matched operation at ~ 0.9MHz in the presence of
process non-idealities such as thickness variations of the
SOI wafer. A prototype device demonstrates x- and y-
axis rate sensitivity of 127 V/deg/sec and
214 V/deg/sec, respectively. High quality factors (Q) of
~ 10,000 are observed in vacuum for the in-plane drive
and out-of-plane sense resonance modes. The device is

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering