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IOP PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING J. Micromech. Microeng. 19 (2009) 074004 (8pp) doi:10.1088/0960-1317/19/7/074004
 

Summary: IOP PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING
J. Micromech. Microeng. 19 (2009) 074004 (8pp) doi:10.1088/0960-1317/19/7/074004
A wide-bandwidth and high-sensitivity
robust microgyroscope
Korhan Sahin1, Emre Sahin2, Said Emre Alper3 and Tayfun Akin2,3,4
1
Department of Mechanical Engineering, Carnegie Mellon University, Pittsburgh, PA 15213, USA
2
Department of Electrical and Electronics Engineering, Middle East Technical University, Ankara,
Turkey
3
MEMS Research and Application Center, Middle East Technical University, Ankara, Turkey
E-mail: tayfun-akin@metu.edu.tr
Received 19 December 2008, in final form 26 March 2009
Published 30 June 2009
Online at stacks.iop.org/JMM/19/074004
Abstract
This paper reports a microgyroscope design concept with the help of a 2 degrees of freedom
(DoF) sense mode to achieve a wide bandwidth without sacrificing mechanical and electronic
sensitivity and to obtain robust operation against variations under ambient conditions. The

  

Source: Akin, Tayfun - Department of Electrical and Electronics Engineering, Middle East Technical University

 

Collections: Engineering