Home

About

Advanced Search

Browse by Discipline

Scientific Societies

E-print Alerts

Add E-prints

E-print Network
FAQHELPSITE MAPCONTACT US


  Advanced Search  

 
SUPPORT LOSS IN MICROMECHANICAL DISK RESONATORS =KLOL +DR DQG )DUURNK $\D]L
 

Summary: SUPPORT LOSS IN MICROMECHANICAL DISK RESONATORS
=KLOL +DR DQG )DUURNK $\D]L
Integrated MEMS Laboratory, School of Electrical and Computer Engineering,
Georgia Institute of Technology, 777 Atlantic Drive, Atlanta, GA 30332-0250, USA
ABSTRACT
In light of recent efforts to implement
micromechanical resonators with high-4 and high
frequency, an analytical model for support loss in
micromechanical disk resonators has been developed
and verified with experimental results. The derived
model is general and applicable to various structures
and support schemes (side-supported and center-
supported disks), providing significant insight to the
geometrical design and choice of materials in high-4
disk resonant structures. The methodology presented in
this paper can be extended to evaluate support loss in
other high-frequency bulk-mode structures such as
length-extensional blocks and bars.
1. INTRODUCTION
The mechanical quality factor (4) of a resonator is

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering