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Broadband dielectric microwave microscopy on micron length scales Alexander Tseleva
 

Summary: Broadband dielectric microwave microscopy on micron length scales
Alexander Tseleva
and Steven M. Anlageb
Center for Superconductivity Research, Department of Physics, University of Maryland, College Park,
Maryland 20742-4111
Zhengkun Ma and John Melngailis
Department of Electrical and Computer Engineering, University of Maryland, College Park,
Maryland 20742-3285
Received 19 January 2007; accepted 1 March 2007; published online 3 April 2007
We demonstrate that a near-field microwave microscope based on a transmission line resonator
allows imaging in a substantially wide range of frequencies, so that the microscope properties
approach those of a spatially resolved impedance analyzer. In the case of an electric probe, the
broadband imaging can be used in a direct fashion to separate contributions from capacitive and
resistive properties of a sample at length scales on the order of one micron. Using a microwave
near-field microscope based on a transmission line resonator we imaged the local dielectric
properties of a focused ion beam milled structure on a high-dielectric-constant Ba0.6Sr0.4TiO3 thin
film in the frequency range from 1.3 to 17.4 GHz. The electrostatic approximation breaks down
already at frequencies above 10 GHz for the probe geometry used, and a full-wave analysis is
necessary to obtain qualitative information from the images. 2007 American Institute of Physics.
DOI: 10.1063/1.2719613

  

Source: Anlage, Steven - Center for Superconductivity Research & Department of Physics, University of Maryland at College Park

 

Collections: Materials Science