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The Effects of Acoustic Mismatch on Internal Dielectrically Transduced Micromechanical
 

Summary: The Effects of Acoustic Mismatch on Internal
Dielectrically Transduced Micromechanical
Resonators
Eugene Hwang and Sunil A. Bhave
Electrical and Computer Engineering
Cornell University
Ithaca, NY USA
eoh3@cornell.edu
Abstract --This paper presents a supplement to the theory of
internal dielectric transduction presented in [1] by including the
effects of acoustic mismatch on the resonant frequency and
motional impedance of internal dielectrically transduced
micromechanical resonators. Analytical expressions for the
mode shapes in said resonators are mathematically derived and
verified for various dielectric and resonator body materials by
comparing numerical simulation results in MATLAB with finite
element analysis (FEA) results using COMSOL. Correction
factors for mismatched materials are presented to aid in the
precise and optimal design of internal dielectrically transduced
micromechanical resonators for applications up to tens of

  

Source: Afshari, Ehsan - School of Electrical and Computer Engineering, Cornell University

 

Collections: Engineering