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Summary: 1.12GHZ
S
C
ABSTRACT
We report on the development o
Acoustic Oscillator (OAO) using an air
actuated silicon optomechanical reson
sensing technique using optomechanical
silicon allows for observation of
resonances of electrostatically excited
3.5GHz. Using amplifiers to compensa
demonstrate an oscillator operating a
8.8dBm output RF power and a pha
dBc/Hz at 10 kHz offset.
INTRODUCTION
Oscillators based on electrostatically
resonators have been demonstrated in th
[1,2]. These oscillators offer phase n
comparable to quartz oscillators while
allowing for easier integration with
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