Summary: A phase-space-compressing, mass-selecting beamline for hyperthermal,
focused ion beam deposition
Kevin J. Boyd, Adam Lapicki, Masato Aizawa, and Scott L. Anderson
Department of Chemistry, University of Utah, 315 South 1400 East RM Dock, Salt Lake City,
Utah 84112-0850
Received 14 April 1998; accepted for publication 8 September 1998
We have developed an ion beamline for hyperthermal ion-surface collisions that incorporates a
phase-space compressor to improve the focusability/current density of the ion beam in the 1­10 eV
deposition energy range. In essence, collisional damping is used to substantially improve the
brightness of the ion source. In addition to the focusing behavior, the beamline also accomplishes
mass selection, source-target pressure reduction of 1010
, confinement of the beam to avoid space
charge spreading, and hyperthermal energy beam transport. For our application the requirement is
moderately tight 100 s of microns focusing at hyperthermal energies 1­100 eV , but the principle
should also be applicable to improving spot sizes/current densities at higher energies. © 1998
American Institute of Physics. S0034-6748 98 01512-3
I. INTRODUCTION
We have constructed an experiment designed to allow
deposition of mass-selected ions on well characterized sur-
faces in ultrahigh vacuum UHV . This instrument is being

Source: Anderson, Scott L. - Department of Chemistry, University of Utah

Collections: Energy Storage, Conversion and Utilization; Materials Science; Chemistry