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Sensors and Actuators A 122 (2005) 307316 Electrically coupled MEMS bandpass filters
 

Summary: Sensors and Actuators A 122 (2005) 307316
Electrically coupled MEMS bandpass filters
Part I: With coupling element
Siavash Pourkamali, Farrokh Ayazi
School of Electrical and Computer Engineering, Georgia Institute of Technology, 791 Atlantic Drive, Atlanta, GA 30332-0250, USA
Received 30 April 2004; accepted 9 March 2005
Available online 3 May 2005
Abstract
This paper, the first of the two parts, presents coupling techniques for implementation of high order narrow-bandwidth bandpass filters from
micromechanical resonators using electrical coupling elements. Active and passive coupling elements are used in this work to implement high
order resonant systems from individual MEMS resonators. The concept of passive coupling of resonators using capacitors as the coupling
elements for filter synthesis and its electromechanical modeling is presented. Active coupling of resonators using transistor-based amplifying
circuits is introduced and demonstrated as well. Capacitively coupled bandpass filters with integrated coupling capacitors and filter quality
factor as high as 1500 at operating frequency of 810 kHz are practically demonstrated. 2 Q-amplification was obtained from a resonator
array consisting of three resonator stages interconnected with active interface circuits.
2005 Elsevier B.V. All rights reserved.
Keywords: Micromechanical filter; Microresonator; Coupling; HARPSS; Quality factor
1. Introduction
Silicon-based MEMS resonators with their high quality
factors, low cost batch fabrication, small size and IC compat-

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering