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Summary: IOP PUBLISHING NANOTECHNOLOGY
Nanotechnology 18 (2007) 375501 (11pp) doi:10.1088/0957-4484/18/37/375501
Microgrippers: a case study for
batch-compatible integration of MEMS
with nanostructures
O Sardan1,4
, B Erdem Alaca1,5
, A D Yalcinkaya1,6
, P Bøggild2
,
P T Tang3
and O Hansen2
1
College of Engineering, Koc University, R Feneri Yolu, 34450 Sariyer, Istanbul, Turkey
2
Department of Micro and Nanotechnology, Danmarks Tekniske Universitet, DK-2800,
Kongens Lyngby, Denmark
3
Department of Manufacturing Engineering and Management, Danmarks Tekniske
Universitet, DK-2800, Kongens Lyngby, Denmark
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