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Nano-Scale 3D Metrology for Surface Characterization and Inspection of High-Precision Manufactured Components W. Hao, S. Huq, D. Page, B. Abidi, A. Koschan, and M. Abidi
 

Summary: Nano-Scale 3D Metrology for Surface Characterization and Inspection of High-Precision Manufactured Components
W. Hao, S. Huq, D. Page, B. Abidi, A. Koschan, and M. Abidi
Imaging Robotics, and Intelligent Systems Laboratory, The University of Tennessee, 1508 Middle Drive, Knoxville, TN 37996
{whao,mhuq,dpage,besma,akoschan,abidi}@utk.edu
INTRODUCTION
The scanning electron microscope (SEM) has been
successfully used as an analysis tool for nano-scale
materials in nuclear and special materials applications for
many years. Recently, the large chamber (LC) SEM at Y-
12 has demonstrated its power in surface analysis and
inspections of large specimens at the nano-scale without
destruction of the specimen. This paper summarizes the
research efforts conducted by UTK in applying state of art
computer vision techniques to the LC-SEM imaging,
particularly 3D characterization and inspection. Two or
more LC-SEM images taken under appropriate condition
(i.e., the specimen is tilted eucentrically in front of the
sensor), combined with certain knowledge of the imaging
process, have been used to infer the 3D surface of the
specimen, which is extremely useful when detailed

  

Source: Abidi, Mongi A. - Department of Electrical and Computer Engineering, University of Tennessee

 

Collections: Computer Technologies and Information Sciences