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Target Block Alignment Error in XY Stage Metrology Shorya Awtar1
 

Summary: 1
Target Block Alignment Error in XY Stage Metrology
Authors
Shorya Awtar1
Precision Engineering Research Group
Massachusetts Institute of Technology, Cambridge, MA 02139
518-577-5500, shorya@mit.edu
Alexander H. Slocum
Professor of Mechanical Engineering, Precision Engineering Research Group
Massachusetts Institute of Technology, Cambridge, MA 02139
617-253-0012, slocum@mit.edu
Abstract
This paper discusses a fundamental question in the characterization of XY stages: Is the orthogonality error of the
stage distinguishable from a target block alignment error without explicitly measuring the target block
misalignment? The conclusion reached here is that, for parallel kinematic stages this is not possible using any
metrology setup or any number of measurements.
Keywords: XY Stage, Metrology Errors, Target Block Alignment
1. Introduction
In the error mapping of an XY stage, one of the primary objectives is to measure the cross-axis and yaw motion
errors [1]. Several deviations from ideal behavior can occur in this characterization. Some of these are attributed to

  

Source: Awtar, Shorya - Department of Mechanical Engineering, University of Michigan

 

Collections: Engineering