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Thermal activation and saturation of ion beam sculpting David P. Hoogerheide,1

Summary: Thermal activation and saturation of ion beam sculpting
David P. Hoogerheide,1
H. Bola George,2
Jene A. Golovchenko,1,2
and Michael J. Aziz2,a)
Physics Department, Harvard University, Cambridge, Massachusetts 02138, USA
Harvard School of Engineering & Applied Sciences, Cambridge, Massachusetts 02138, USA
(Received 5 January 2011; accepted 17 February 2011; published online 7 April 2011)
We report a material-dependent critical temperature for ion beam sculpting of nanopores in
amorphous materials under keV ion irradiation. At temperatures below the critical temperature,
irradiated pores open at a rate that soon saturates with decreasing temperature. At temperatures
above the critical temperature, the pore closing rate rises rapidly and eventually saturates with
increasing temperature. The observed behavior is well described by a model based on adatom
diffusion, but is difficult to reconcile with an ion-stimulated viscous flow model. VC 2011 American
Institute of Physics. [doi:10.1063/1.3569705]
Ion beams are effective tools for controlling surface
morphologies down to molecular dimensions. Combined


Source: Aziz, Michael J.- School of Engineering and Applied Sciences, Harvard University
Hoogerheide, David P. - Department of Physics, Harvard University


Collections: Materials Science; Physics