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538 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 10, NO. 4, DECEMBER 2001 Application of a Parallel DSMC Technique to Predict
 

Summary: 538 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 10, NO. 4, DECEMBER 2001
Application of a Parallel DSMC Technique to Predict
Flow Characteristics in Microfluidic Filters
Ozgur Aktas, N. R. Aluru, Member, IEEE, and Umberto Ravaioli, Senior Member, IEEE
Abstract--Using a parallel implementation of the direct simu-
lation Monte Carlo (DSMC) method, periodic MEMS microfilters
are studied in detail. The dependence of the flow characteristics
on geometry, Knudsen number, pressure difference, spacing be-
tween the filter elements, and accommodation coefficients are in-
vestigated. By comparing DSMC results with the widely used an-
alytical formulas, the validity range of the analytical approaches
is evaluated. The simulation results show that velocity slip exists
both on the filter channel walls and on the filter membrane and re-
sults in an increased flow rate. Velocity slip increases strongly with
decreasing accommodation coefficients. For long channels, this re-
sults in a strong increase in flow rate; whereas for short channels,
the increase in flow rate is limited. For the filter separations consid-
ered in this paper, we observe that separation between filter chan-
nels does not influence the flow rate within each channel. [636]
Index Terms--Incomplete accommodation, microfilters, mi-

  

Source: Aluru, Narayana R. - Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign

 

Collections: Engineering; Materials Science