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A wireless batch sealed absolute capacitive pressure sensor Orhan Akarb
 

Summary: A wireless batch sealed absolute capacitive pressure sensor
Orhan Akarb
, Tayfun Akina,b,*
, Khalil Naja®c
a
Department of Electrical and Electronics Engineering, Middle East Technical University, 06531 Ankara, Turkey
b
TUBITAK-BILTEN, Middle East Technical University, Ankara, Turkey
c
Center for Wireless Integrated Microsystems, The University of Michigan, Ann Arbor, MI, USA
Received 28 March 2001; received in revised form 9 August 2001; accepted 26 September 2001
Abstract
This paper reports the development of an absolute wireless pressure sensor that consists of a capacitive sensor and a gold-electroplated
planar coil. Applied pressure deŻects a 6 mm-thin silicon diaphragm, changing the capacitance formed between it and a metal electrode
supported on a glass substrate. The resonant frequency of the LC circuit formed by the capacitor and the inductor changes as the
capacitance changes; this change is sensed remotely through inductive coupling, eliminating the need for wire connection or implanted
telemetry circuits. The sensor is fabricated using the dissolved-wafer process and utilizes a boron-doped silicon diaphragm supported on an
insulating glass substrate. The complete sensor measures 2:6 mm  1:6 mm in size and incorporates a 24-turns gold-electroplated coil that
has a measured inductance of 1.2 mH. The sensor is designed to provide a resonant frequency change in the range 95±103 MHz for a
pressure change in the range 0±50 mmHg with respect to ambient pressure, providing a pressure responsivity and sensitivity of 160 kHz/

  

Source: Akin, Tayfun - Department of Electrical and Electronics Engineering, Middle East Technical University

 

Collections: Engineering