Home

About

Advanced Search

Browse by Discipline

Scientific Societies

E-print Alerts

Add E-prints

E-print Network
FAQHELPSITE MAPCONTACT US


  Advanced Search  

 
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 18, NO. 6, DECEMBER 2009 1401 Internal Dielectric Transduction in
 

Summary: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 18, NO. 6, DECEMBER 2009 1401
Internal Dielectric Transduction in
Bulk-Mode Resonators
Dana Weinstein, Member, IEEE, and Sunil A. Bhave, Member, IEEE
Abstract--This paper investigates electrostatic transduction of
a longitudinal-mode silicon acoustic resonator with internal di-
electric films. Geometric optimization of internal dielectrically
transduced resonators is derived analytically and shown exper-
imentally. Analysis of internal dielectric transduction shows a
maximum transduction efficiency with thin dielectric films at
points of maximum strain of the desired resonant mode. With
this design optimization, a silicon bar resonator is realized with a
ninth harmonic resonance of 4.5 GHz and a quality factor of over
11 000, resulting in a record high f Q product in silicon of
5.1 1013
. The novel dielectric transducer demonstrates im-
proved resonator performance with increasing frequency, with
optimal transduction efficiency when the acoustic wavelength is
twice the dielectric thickness. Such frequency scaling behavior en-
ables the realization of resonators up to the super-high-frequency

  

Source: Afshari, Ehsan - School of Electrical and Computer Engineering, Cornell University

 

Collections: Engineering