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DIGITALLY-TUNABLE MEMS FILTER USING MECHANICALLY-COUPLED RESONATOR ARRAY
 

Summary: DIGITALLY-TUNABLE MEMS FILTER USING MECHANICALLY-COUPLED
RESONATOR ARRAY
Hengky Chandrahalim and Sunil A. Bhave
OxideMEMS Lab, Electrical and Computer Engineering, Cornell University, Ithaca, New York, USA
ABSTRACT
This paper reports on the design of a bandwidth-tunable RF
MEMS filter using a series-coupled array of dielectrically-
transduced square-extensional mode resonators. The
proposed digital tuning scheme provides channel-agility and
bandwidth granularity for analog spectral processors and RF
spectrum analyzers. The resonators and filters are fabricated
on the 3 Ám thick device layer of a heavily doped SOI wafer
with a 100 nm thick silicon nitride film sandwiched between
the polysilicon electrodes and the silicon device layer. A
511 MHz overtone square-extensional mode resonator is
demonstrated with a quality factor (Q) of 1,800 in air and
motional impedance (RX) of 1.1 k. An array of four such
resonators is coupled mechanically to form a channel-select
filter with 1.4 MHz bandwidth at 509 MHz center frequency.
By switching the DC-biasing scheme, the filter is split into

  

Source: Afshari, Ehsan - School of Electrical and Computer Engineering, Cornell University

 

Collections: Engineering