Summary: Silicon Monolithic MEMS + Photonic Systems
Professor Sunil Bhave
Optomechanical systems offer one of the most sensitive methods for detecting mechanical
motion using shifts in the optical resonance frequency of the optomechanical resonator.
Presently, these systems are used for measuring mechanical thermal noise displacement or
mechanical motion actuated by optical forces. Meanwhile, electrostatic capacitive actuation
and detection is the main transduction scheme used in RF MEMS resonators. The use of
electrostatics is convenient as it allows direct integration with electronics used for processing
the RF signals.
In this talk, I will introduce a method for actuating an optomechanical resonator using
electrostatic forces and sensing of mechanical motion by using the optical intensity modulation
at the output of an optomechanical resonator, integrated into a monolithic system fabricated
on a silicononinsulator (SOI) platform. I will discuss new applications enabled by this hybrid
system including OptoAcoustic Oscillators (OAO) and OptoMechanical Gyroscopes (OMG).
Sunil received the B.S. and Ph.D. degrees from Berkeley in EECS in
1998 and 2004 respectively. In October 2004, he joined the faculty of