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Input and Design Optimization Under Uncertainty to Minimize the Impact Velocity
 

Summary: Input and Design Optimization Under
Uncertainty to Minimize the Impact Velocity
of an Electrostatically-Actuated MEMS
Switch
M. S. Allen 1
, J. E. Massad
, R. V. Field, Jr.
and C. W. Dyck
Engineering Physics Department
University of Wisconsin-Madison
Madison, WI 53706
Applied Mechanics Development
RF / Optoelectronics
Sandia National Laboratories
Albuquerque, NM 87185 2
Abstract
The dynamic response of a radio-frequency micro-electro mechanical system (RF
MEMS) to a time-varying electrostatic force is optimized to enhance robustness to
variations in material properties and geometry. The device functions as an electrical
switch, where an applied voltage is used to close a circuit. The objective is to mini-

  

Source: Allen, Matthew S. - Department of Engineering Physics, University of Wisconsin at Madison

 

Collections: Engineering