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INTERNATIONAL JOURNAL FOR NUMERICAL METHODS IN ENGINEERING Int. J. Numer. Meth. Engng 2009; 77:17891808
 

Summary: INTERNATIONAL JOURNAL FOR NUMERICAL METHODS IN ENGINEERING
Int. J. Numer. Meth. Engng 2009; 77:17891808
Published online 20 October 2008 in Wiley InterScience (www.interscience.wiley.com). DOI: 10.1002/nme.2469
A methodology for fast finite element modeling of electrostatically
actuated MEMS
Prasad S. Sumant1,,, Narayana R. Aluru1 and Andreas C. Cangellaris2
1Department of Mechanical Science and Engineering, University of Illinois, 1206 W. Green St., Urbana,
IL 61801, U.S.A.
2Department of Electrical and Computer Engineering, University of Illinois, 1406 W. Green St., Urbana,
IL 61801, U.S.A.
SUMMARY
In this paper, a methodology is proposed for expediting the coupled electro-mechanical finite element
modeling of electrostatically actuated MEMS. The proposed methodology eliminates the need for repeated
finite element meshing and subsequent electrostatic modeling of the device during mechanical deformation.
We achieve this by using an approximation of the charge density on the movable electrode in the deformed
geometry in terms of the charge density in the non-deformed geometry and displacements of the movable
electrode. The electrostatic problem has to be solved only once and thus this method speeds up the
coupled electro-mechanical simulation process. The proposed methodology is demonstrated through its
application to the modeling of four MEMS devices with varying length-to-gap ratios, multiple dielectrics
and complicated geometries. Its accuracy is assessed through comparisons of its results with results

  

Source: Aluru, Narayana R. - Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign

 

Collections: Engineering; Materials Science