Summary: Analysis of the Homogeneous Thermal Decomposition of the Tungsten
Dimethylhydrazido Complex Cl4(CH3CN)W(NNMe2) Using in situ Raman
Spectroscopy and DFT Calculations
Jooyoung Lee,a
Dojun Kim,a
Oh Hyun Kim,a
Tim Anderson,a
Jürgen Koller,b
Dan
Denomme,b
Sophia Z. Habibi,b
and Lisa McElwee-Whiteb
a
Department of Chemical Engineering, University of Florida, Gainesville, FL 32611-6005,
USA
b
Department of Chemistry, University of Florida, Gainesville, FL 32611-7200, USA
The gas-phase decomposition pathways of the tungsten
dimethylhydrazido complexes Cl4(RCN)W(NNMe2) (1a: R = CH3;
1b: R = Ph), precursors for single source deposition of WNxCy, were

Source: Anderson, Timothy J. - Chemical Engineering Department, University of Florida

Collections: Materials Science