Summary: EE6504: Nanoscale Engineering
Nanofabrication Techniques-II
Associate Professor Adekunle Adeyeye
Dept. of Electrical & Computer Engineering
National University of Singapore
E-mail: eleaao@nus.edu.sg
Office:E4-08-08
©Adekunle Adeyeye 2009/2010
Nanoimprint Lithography
©Adekunle Adeyeye 2009/2010
Based on Ultraviolet (UV) Light-Curable Material
UV-curable
Material
Mold
Transfer patterns on UV-
curable material
UV
Nanoimprint Lithography
©Adekunle Adeyeye 2009/2010
Laser-Assisted Direct Imprint (LADI)

Source: Adeyeye, Adekunle - Department of Electrical and Computer Engineering, National University of Singapore

Collections: Physics; Materials Science