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Summary: Comparison of Microscopic
Modalities for the 3D Model
Reconstruction of Nanodevices
A Thesis
Presented for
Master of Science
Degree
The University of Tennessee, Knoxville
Christopher Robert Kammerud
December 2005
ii
Acknowledgements
Wherever we take the time and energy to look, new worlds are waiting for us. My time
as a Master's student has opened up places, in my heart and mind, which had previously
gone unexplored. Dr. Mongi Abidi brought me to the IRIS lab. He gave me funding and
a place from which to start exploring, and for that I'll always be grateful. I have to thank
Dr. Besma Abidi for her work as my advisor, giving me points to aim at, and helping
make sure that I reached them. With her help and guidance, I discovered what it was like
to have my research published. I would also like to thank Greg Jones and John Dunlap,
who were in charge of the microscopes I used in my research. They introduced me to a
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