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THERMOELASTIC DAMPING IN TRENCH-REFILLED POLYSILICON Reza Abdolvand 1
 

Summary: THERMOELASTIC DAMPING IN TRENCH-REFILLED POLYSILICON
RESONATORS
Reza Abdolvand 1
, Gavin K. Ho 1
, Ahmet Erbil 2
, Farrokh Ayazi 1
Georgia Institute of Technology
1
School of Electrical and Computer Engineering, 2
School of Physics
Atlanta, Georgia 30332-0250 USA
rezaa@ece.gatech.edu; gavinho@ece.gatech.edu; Tel: (404) 385-0962
ABSTRACT
This paper presents quality factor measurement results for
trench-refilled (TR) polysilicon beam resonators which
demonstrate an increase in Q as their resonant frequency
increases, a trend opposite to what is expected from solid
beams of the same dimensions. This phenomenon is
believed to be due to a multi-path thermoelastic damping
characteristic. The frequency-dependant behavior of QTED

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering