Summary: Kinetic Lattice Monte Carlo (KLMC)Kinetic Lattice Monte Carlo (KLMC)
Simulation of Facet Growth RateSimulation of Facet Growth Rate
Zhiyong Wang
Youhong Li
James B. Adams
Arizona State University
Acknowledgements
David F. Richards, NCSA, NSF
MotivationMotivation
s The semiconductor industry is presently shifting
from the use of Al to Cu lines for interconnects.
s The microstructure of Cu thin film affects the
properties and thus the performance of
interconnects.
s The ultimate goal is to develop and share a
design tool which will assist in optimizing the final
microstructure of thin film based on intelligent
process optimization.
Three Levels of SimulationsThree Levels of Simulations
Embedded Atom Method (EAM)

Source: Adams, James B - Department of Chemical and Materials Engineering, Arizona State University

Collections: Materials Science