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Summary: First demonstration of sub-0.25ym-widthemitter InP-DHBTs with >400 GHz ftand
r400 GHz f,,,
T Hussain, Y Royter, D Hitko, M Montes, M Madhav, I Milosavljevic, R Rajavel, S Thomas, M
Antcliffe, A Arthur, Y Boegeman, M Sokolich
HRL Laboratories, LLC, 3011 Malibu Canyon Road, Malibu CA 90265
J Li, P Asbeck
University of California San Diego, La Jolla, CA
Abstract:
We report performance of sub-0.25pm emitter-width
InPflnGaAsilnP DHBTs. These are the smallest emitter-
width Ill-V devices reported to date. Measured ft'fmax
performance of 406GHd423GHz is the first ever reported for
a sub-0.25pm emitter-width DHBT and among the fastest for
any DHBTs. Withthepeakf;andfmw. performance occurring
at I, = 8mA (Vch-1.2Sv), this is the lowest power
consumption DHBT ever reported with state of the art cutoff
frequencies. The as-patterned emitter contact metal width for
these devices was 0.25pm and the width of the emitter at the
emitter-base junction is less than 0.25pm owing to
undercutting of the underlying emitter semiconductor. When
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