Summary: 0885­3010/$25.00 © 2010 IEEE
1664 IEEE TransacTIons on UlTrasonIcs, FErroElEcTrIcs, and FrEqUEncy conTrol, vol. 57, no. 7, jUly 2010
Abstract --This paper presents a supplement to the 1-D the-
ory of internal dielectric transduction by including the effects
of acoustic mismatch on the resonant frequency and motional
impedance of internal dielectrically transduced micromechani-
cal resonators. Analytical expressions for the mode shapes in
said resonators are mathematically derived and verified for
various dielectric and resonator body materials by comparing
numerical simulation results with finite element analysis re-
sults using commercial software. Correction factors to the reso-
nant frequencies and motional impedances predicted by the
original theory are presented to provide designers a simple yet
accurate model that takes into account the effects of acoustic
mismatch. Our analysis shows that the ratio of Young's moduli
of the dielectric film and resonator body materials significantly
impacts the motional impedance and thus must be considered
when choosing the optimal dielectric material. This modified
model will allow for precise and optimal design of internal
dielectrically transduced micromechanical resonators for ap-

Source: Afshari, Ehsan - School of Electrical and Computer Engineering, Cornell University

Collections: Engineering