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ELECTROSTATIC SELF-CALIBRATION OF VIBRATORY GYROSCOPES G. Casinovi, W.K. Sung, M. Dalal, A. N. Shirazi and F. Ayazi
 

Summary: ELECTROSTATIC SELF-CALIBRATION OF VIBRATORY GYROSCOPES
G. Casinovi, W.K. Sung, M. Dalal, A. N. Shirazi and F. Ayazi
Georgia Institute of Technology, Atlanta, Georgia, USA
ABSTRACT
This paper introduces a new approach to self-
calibration of Coriolis-based vibratory gyroscopes that
does not require the use of any additional moving parts or
a calibration stage. Instead, the effect of the Coriolis force
on the device is mimicked by the application of a rotating
excitation to the device drive and sense modes. This
calibration method is based on the theoretical analysis of
an equivalent 2-DOF mass-spring model, which can be
used to describe the behavior of a variety of MEMS
gyroscopes. The method is validated both by the results of
finite-element simulations and by experimental
measurement.
INTRODUCTION
On-chip self-calibration of a gyroscope is a valuable
feature that can eliminate expensive and time consuming
mechanical calibration of the device using rate tables and

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering