Summary: INSTITUTE OF PHYSICS PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING
J. Micromech. Microeng. 16 (2006) 2646­2658 doi:10.1088/0960-1317/16/12/018
A hybrid full-Lagrangian technique for
the static and dynamic analysis of
magnetostatic MEMS
Sudipto K De and N R Aluru
Department of Mechanical Science and Engineering, Beckman Institute for Advanced
Science and Technology, University of Illinois at Urbana-Champaign, 405 N Mathews
Avenue, Urbana, IL 61801, USA
E-mail: aluru@uiuc.edu
Received 19 August 2006, in final form 8 October 2006
Published 7 November 2006
Online at stacks.iop.org/JMM/16/2646
Abstract
Magnetostatic microelectromechanical systems (MEMS) are based on the
electromagnetic interactions between magnetic microstructures and active
(coils) or passive (permanent magnets) magnetic field sources. They offer
distinct advantages at the micrometer scale in strength, polarity and distance
of actuation, when compared to other methods of actuation in MEMS. For
proper understanding and detailed exploration of magnetostatic MEMS, it is

Source: Aluru, Narayana R. - Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign

Collections: Engineering; Materials Science