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Summary: MONOLITHICALLY INTEGRATED PIEZOMEMS SP2T SWITCH AND
CONTOUR-MODE FILTERS
J.S. Pulskamp1
, D.C. Judy1
, R.G. Polcawich1
, R. Kaul1
, H. Chandrahalim2
, and S.A. Bhave2
1
US Army Research Laboratory, Adelphi, MD, USA
2
Cornell University, Ithaca, NY, USA
ABSTRACT
This paper provides the first experimental
demonstration of monolithically integrated piezoelectric
MEMS RF switches with contour mode filters. Lead
zirconate titanate (PZT) thin films are utilized to enable
both low-voltage switch operation and filter tunability.
This research leverages previous work using PZT
actuators for low-voltage, wide-band switches and PZT
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