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U-sequence in electrostatic microelectromechanical systems (MEMS)
 

Summary: U-sequence in electrostatic
microelectromechanical systems (MEMS)
BY SUDIPTO K. DE AND N. R. ALURU*
Department of Mechanical and Industrial Engineering,
Beckman Institute for Advanced Science and Technology,
University of Illinois at Urbana-Champaign, Urbana IL 61801, USA
In this paper, the presence of U(Universal)-sequence (a sequence of periodic windows
that appear beyond the period doubling (PD) route to chaos) in electrostatic
microelectromechanical systems (MEMS) is reported. The MEM system is first brought
to a nonlinear steady state by the application of a large dc bias close to the dynamic pull-
in voltage of the device. An ac voltage (the bifurcation parameter) is next applied to the
system and increased gradually. A sequence of PD bifurcations leading to chaos is
observed for resonant and superharmonic excitations (frequency of the ac voltage). On
further increase in the ac voltage (beyond where chaos sets in), U-sequence is observed in
the system. Under superharmonic excitation, the sequence is found to be a modified form
of the U-sequence referred to as the `UM-sequence' in this paper. The appearance of a
periodic window with K oscillations per period or K-cycles in the normal U-sequence
is replaced by a corresponding periodic window with KM-cycles in the UM-sequence.
M stands for the Mth superharmonic frequency of excitation. The formation of the
periodic windows from a chaotic state in the UM-sequence takes place through

  

Source: Aluru, Narayana R. - Department of Mechanical and Industrial Engineering, University of Illinois at Urbana-Champaign

 

Collections: Engineering; Materials Science