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Micropatterned lead zirconium titanate thin films J.S. Vartulia)
 

Summary: Micropatterned lead zirconium titanate thin films
J.S. Vartulia)
Department of Chemical Engineering, Princeton University, Princeton, New Jersey 08544-5263
M. O¨ zenbas¸
Department of Metallurgical and Materials Engineering, Middle East Technical University,
Ankara 06531, Turkey
C-M. Chun,b)
M. Trau,c)
and I.A. Aksay
Department of Chemical Engineering, Princeton University, Princeton, New Jersey 08544-5263
(Received 20 February 2003; accepted 26 February 2003)
Micropatterning of Pb(Zr0.52Ti0.48)O3 (PZT) thin films with line features as small as
350 nm was demonstrated through capillary molding of organometallic solutions within
the continuous channels of an elastomeric mold. Despite the large stresses that develop
during the evaporation of the solvent, pyrolysis of the organics, and the densification
and crystallization of the inorganic gel, the patterned crystalline PZT films were
crack-free and mechanically robust. Flawless regions as large as 1 cm2
were obtained.
The cross-sectional shape of the patterned PZT lines was trapezoidlike. Single
perovskite PZT grains that formed during annealing at 600­700 °C completely filled

  

Source: Aksay, Ilhan A. - Department of Chemical Engineering, Princeton University

 

Collections: Materials Science