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A high performance R-D readout circuitry for lg resolution microaccelerometers
 

Summary: A high performance R-D readout circuitry for lg resolution
microaccelerometers
_Ilker E. Ocak Reha Kepenek Haluk Kulah Tayfun Akin
Received: 25 August 2008 / Revised: 3 November 2009 / Accepted: 3 December 2009 / Published online: 22 December 2009
Springer Science+Business Media, LLC 2009
Abstract This paper reports a second order electrome-
chanical sigma-delta readout for micro-g resolution acceler-
ometers in addition to other high-sensitivity capacitive
microsensors with large base capacitance. The chip imple-
ments a switched-capacitor readout front-end and an over-
sampled sigma-delta modulator, and hence can be used for
both open-loop analog readout and closed-loop control and
readout with direct digital output. The readout circuit has
more than 115 dB dynamic range and can resolve less than
3 aF/HHz. Also this IC includes start-up circuit and feedback
mechanism for closed-loop control of the accelerometer with
a single 5 V supply in a 4 g range. Together with the
accelerometer, bandwidthof the overall systemislimited with
the sensor resonance frequency (1.53 kHz) in the open-loop
mode. However in closed loop mode, oversampling of the

  

Source: Akin, Tayfun - Department of Electrical and Electronics Engineering, Middle East Technical University

 

Collections: Engineering